High gain device

ABSTRACT

A method of forming a device is disclosed. A substrate having a high gain (HG) device region for a HG transistor is provided. A HG gate is formed on the substrate in the HG device region. The HG gate includes sidewall spacers on its sidewalls. Heavily doped regions are formed adjacent to the HG gate. Inner edges of the heavily doped regions are aligned with about outer edges of the sidewall spacers of the HG gate. The heavily doped regions serve as HG source/drain (S/D) regions of the HG gate. The HG S/D regions do not include lightly doped drain (LDD) regions or halo regions.

BACKGROUND

Complementary Metal Oxide Semiconductor (CMOS) transistors have beenwidely employed. For example, CMOS transistors have been employed foranalog applications. Analog applications employ CMOS transistors withhigh gains. However, as CMOS technology migrates into the nano-regime,it has been found that gains of CMOS transistors become reduced,affecting its effectiveness.

The present disclosure relates to providing high gain transistors in thenanotechnology regime.

SUMMARY

Embodiments generally relate to semiconductor devices or integratedcircuits (ICs). In one embodiment, a method of forming a device isdisclosed. A substrate having a high gain (HG) device region for a HGtransistor is provided. A HG gate is formed on the substrate in the HGdevice region. The HG gate includes sidewall spacers on its sidewalls.Heavily doped regions are formed adjacent to the HG gate. Inner edges ofthe heavily doped regions are aligned with about outer edges of thesidewall spacers of the HG gate. The heavily doped regions serve as HGsource/drain (S/D) regions of the HG gate. The HG S/D regions do notinclude lightly doped drain (LDD) regions or halo regions.

In another embodiment, a method of forming a device is presented. Themethod includes providing a substrate having at least a first deviceregion for a first transistor and a second device region for a secondtransistor. A first gate is formed on the first device region and asecond gate is formed on the second device region. The gates includesidewall spacers on their sidewalls. Heavily doped regions are formedadjacent to the gates. Inner edges of the heavily doped regions arealigned with about outer edges of the sidewall spacers of the gates. Theheavily doped regions serve as source/drain (S/D) regions of the gates.The S/D regions of the second transistor do not include lightly dopeddrain (LDD) regions or halo regions.

In yet another embodiment, a device is disclosed. The device includes asubstrate having a high gain (HG) device region for a HG transistor. AHG gate is disposed on the substrate in the HG device region. The HGgate includes sidewall spacers on its sidewalls. Heavily doped regionsare disposed adjacent to the HG gate. Inner edges of the heavily dopedregions are aligned with about outer edges of the sidewall spacers ofthe HG gate. The heavily doped regions serve as HG source/drain (S/D)regions of the HG gate. The HG S/D regions do not include lightly dopeddrain (LDD) regions or halo regions.

These and other advantages and features of the embodiments hereindisclosed, will become apparent through reference to the followingdescription and the accompanying drawings. Furthermore, it is to beunderstood that the features of the various embodiments described hereinare not mutually exclusive and can exist in various combinations andpermutations.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings, like reference characters generally refer to the sameparts throughout the different views. Also, the drawings are notnecessarily to scale, emphasis instead generally being placed uponillustrating the principles of the invention. In the followingdescription, various embodiments of the present invention are describedwith reference to the following drawings, in which:

FIG. 1 shows cross-sectional view of a portion of an embodiment of adevice;

FIGS. 2 a-f show cross-sectional views of an embodiment of a process forforming a device; and

FIGS. 3 a-b show graphs comparing the ID-VD plot for different NMOS andPMOS devices.

DETAILED DESCRIPTION

Embodiments generally relate to semiconductor devices or integratedcircuits (ICs). More particularly, some embodiments relate to high gaindevices. For example, high gain devices include transistors, such asmetal oxide transistors (MOS). The high gain devices can be employed inanalog applications, such as high DC gain amplifier, audio amplifier oraudio Codex. The high gain transistors can be easily integrated intodevices or ICs with core or digital devices. The devices or ICs can beincorporated into or used with, for example, consumer electronicproducts, and particularly portable consumer products such as, forexample, mobile phones, tablets, and PDAs.

FIG. 1 shows a cross-sectional view of a portion of an embodiment of adevice 100. The device, for example, is an IC. Other types of devicesmay also be useful. As shown, the device includes a substrate 101. Thesubstrate, for example, is a silicon substrate. Other types ofsubstrates, such as silicon germanium, germanium, gallium arsenide, orcrystal-on-insulator (COI) such as silicon-on-insulator (SOI), are alsouseful. The substrate may be a doped substrate. For example, thesubstrate can be lightly doped with p-type dopants. Providing asubstrate with other types of dopants or dopant concentrations, as wellas an undoped substrate, may also be useful.

The device may include doped regions having different dopantconcentrations. For example, the device may include heavily doped (x⁺),intermediately doped (x) and lightly doped (x⁻) regions, where x is thepolarity type which can be p or n. A lightly doped region may have adopant concentration of about 1E11-1E13/cm², and an intermediately dopedregion may have a dopant concentration of about 1E13-1E15/cm², and aheavily doped region may have a dopant concentration of about1E15-1E17/cm². Providing other dopant concentrations for the differenttypes of doped regions may also be useful. For example, the ranges maybe varied, depending on the technology node. P-type dopants may includeboron (B), aluminum (Al), indium (In) or a combination thereof, whilen-type dopants may include phosphorous (P), arsenic (As), antimony (Sb)or a combination thereof.

The substrate includes first and second device regions 105 a-b for firstand second transistors 110 and 140. In one embodiment, the first deviceregion is for a core transistor and the second device region is for ahigh gain (HG) transistor. The first device region may be disposed in acore or logic device region of the substrate and the second deviceregion may be disposed in an analog or HG device region. The substratemay also include regions for other types of circuitry, depending on thetype of device or IC. For example, the device may also include regionsfor intermediate voltage (IV) and high voltage (HV) devices as well asan array region for memory devices. In other embodiments, the firstdevice region may include a HV or IV device. Other configurations offirst and second device regions may also be useful.

Isolation regions may be provided for isolating or separating differentregions of the substrate. In one embodiment, the device regions areisolated from other regions by isolation regions 180. For example, anisolation region surrounds a device region. The isolation regions, forexample, are shallow trench isolation (STI) regions. Other types ofisolation regions may also be employed. For example, the isolationregions may be deep trench isolation (DTI) regions. The STI regions, forexample, extend to a depth of about 2000-5000 Å. Providing isolationregions which extend to other depths may also be useful.

A device well 112 may be disposed in a device region. In one embodiment,device wells are provided for first and second device regions. A devicewell is disposed within the isolation region. A depth of the devicewells may be about 0.5-5 μm. Other depths for the device wells may alsobe useful. In one embodiment, the device wells are doped with secondpolarity type dopants. For example, the device wells are doped withp-type dopants. Alternatively, the second polarity type dopants may ben-type. The device wells serve as bodies of the transistors. Forexample, the device well in the first device region serves as a body ofthe first transistor and the device well in the second device regionserves as a body of the second transistor. The dopant concentration ofthe device wells may be light to intermediate. For example, the dopantconcentration of the device wells may be about 5E12-5E13/cm². Otherdopant concentration for the device wells may also be useful.

The first transistor includes a first gate 125 on the surface of thesubstrate; the second transistor includes a second gate 155 on thesurface of the substrate. A gate, for example, includes a gate electrode136 over a gate dielectric 134. The gate electrode, for example, may bepolysilicon. The gate electrode may be about 700-5000 Å thick. Othertypes of gate electrodes as well as thicknesses may also be useful. Asfor the gate dielectric, it may be formed of silicon oxide. Thethickness of the gate dielectric may be, for example, about 10-40 Å.Other types of gate dielectrics or thicknesses may also be useful.

As shown, the thickness of the gate dielectrics for the transistors isthe same. For example, the first transistor is a core transistor. Inother embodiments, the transistors may have gate dielectrics ofdifferent thicknesses. For example, in the case where the firsttransistor is an IV or a HV transistor, the transistors may havedifferent gate dielectric thicknesses.

Dielectric sidewall spacers 138 are disposed on sidewalls of the gate.The sidewall spacers, for example, may be silicon oxide. Other types ofdielectric materials or combination of materials may be used for thespacers. It is understood that the first and second gates need not bethe same type of gates. For example, the various components of the firstand second gates may be formed of different materials or have differentconfigurations.

A length of a channel of a transistor is equal to the width of the gate.For example, the channel length of a transistor is equal to the width ofthe gate between its sidewalls. In one embodiment, the first transistorhas a gate width equal to a minimum feature size F. In one embodiment, Fis in the nano technology regime. In one embodiment, F is less than 0.18μm or 180 nm. In another embodiment, F is 0.13 μm or less. Providingother dimensions for F may also be useful. It is understood that thefirst and second gates need not be of the same width. It is furtherunderstood that a device may have different transistors with differentgate widths. For example, the channel length of the HG transistor isgreater than F. In one embodiment, the channel length of the HGtransistor may be about 1 μm or longer. The longer the channel length,the higher the output resistance for the HG transistor. Providing otherchannel lengths may also be useful, for example, depending on designrequirements. The gate may be a gate conductor which forms gates ofmultiple transistors. For example, the gate conductor may traverse aplurality of device regions separated by isolation regions. Thepluralities of transistors have a common gate formed by the gateconductor. Other configurations of gate conductors may also be useful.

The first transistor includes first doped regions 120 disposed in thesubstrate adjacent to the sides of the first gate. For example, a firstdoped region is disposed adjacent to about an outer edge of thedielectric sidewall spacer of the first gate and another first dopedregion is disposed adjacent to about an outer edge of the otherdielectric sidewall spacer of the first gate. The doped regions, forexample, are from the isolation regions to about the sides of the firstgate. In one embodiment, inner edges 121 of the doped regions arealigned with about outer edges of the dielectric sidewall spacers of thefirst gate. The doped regions, in one embodiment, are heavily doped withfirst polarity type dopants for a first type transistor. For example,the doped regions are heavily doped n-type (n⁺) regions for a n-typetransistor. Providing heavily doped p-type (p⁺) regions may also beuseful for a p-type transistor. The heavily doped regions, for example,have a dopant concentration of about 1E15-1E17/cm². Other dopantconcentrations for the doped regions may also be useful. The depth ofthe doped regions may be about 0.1-0.4 μm. Providing doped regionshaving other depths may also be useful. Additionally, it is notnecessary that the first doped regions have the same depth. The dopedregions serve as source/drain (S/D) regions of the transistor.

In one embodiment, the first transistor includes lightly doped drain(LDD) regions 124. As shown in FIG. 1, inner edges 124 a of the LDDregions adjacent to the sides of the gate are aligned with aboutsidewalls of the first gate. In one embodiment, the LDD region 124extends from the first doped regions to underlap the gate. The LDDregions should underlap the gate sufficiently so that the S/D regionsare in communication with the channel under the gate. The underlapportion may be, for example, about 0.004-0.04 μm. Providing an underlapportion which underlaps the gate by other amounts may also be useful.The LDD regions, in one embodiment, are lightly doped with firstpolarity type dopants for a first type transistor. For example, thedoped regions are lightly doped n-type (n⁻) regions for a n-typetransistor. Providing lightly doped p-type (p⁻) regions may also beuseful for a p-type transistor. The LDD regions, for example, have adopant concentration of about 5E13-5E15/cm². Other dopant concentrationsfor the doped regions may also be useful. The depth of the LDD regionsmay be about 0.05-0.3 μm. Providing LDD regions having other depths mayalso be useful.

Halo regions 126, in one embodiment, are provided in the substrate. Ahalo region, for example, extends under the gate beyond the LDD regions.The halo regions, for example, extend under the gate beyond the LDDregions and above the first doped regions. The underlap portion may be,for example, about 0.002-0.02 μm. Providing an underlap portion whichunderlaps the gate by other amounts may also be useful. In oneembodiment, the halo regions may be intermediately or heavily doped withsecond polarity type dopants. The halo regions, for example, may have adopant concentration of about 5E13-5E14/cm². Other dopant concentrationsfor the halo regions may also be useful.

As described, the second transistor is a HG transistor. The channellength of the second transistor, for example, may be at least about 0.5μm. Other channel length dimensions for the HG transistor may also beuseful. The second transistor includes second doped regions 150 disposedin the substrate adjacent to the sides of the second gate. For example,a second doped region is disposed adjacent to about an outer edge of thedielectric sidewall spacer of the second gate and another second dopedregion is disposed adjacent to about an outer edge of the otherdielectric sidewall spacer of the second gate. The second doped regions,for example, are from the isolation regions to about the sides of thesecond gate. In one embodiment, inner edges 151 of the second dopedregions are aligned with about outer edges of the dielectric sidewallspacers of the second gate. The second doped regions, in one embodiment,are heavily doped with first polarity type dopants for a first typetransistor. For example, the second doped regions are heavily dopedn-type (n⁺) regions for a n-type transistor. Providing heavily dopedp-type (p⁺) regions may also be useful for a p-type transistor. Theheavily doped regions, for example, have a dopant concentration of about1E15-1E17/cm². Other dopant concentrations for the doped regions mayalso be useful. The depth of the second doped regions may be about0.1-0.4 μm. Providing doped regions having other depths may also beuseful. The first and second doped regions need not have the same depth.The second doped regions serve as source/drain (S/D) regions of thesecond transistor.

In some embodiments, a dielectric etch stop layer (not shown) is formedover the transistors. The etch stop layer, for example, is a siliconnitride etch stop layer. Other types of etch stop layers may also beuseful. The etch stop layer should have a material which can beselectively removed from a dielectric layer thereover. The etch stoplayer facilitates in forming contact plugs to contact regions of thetransistor, such as the gate electrode and doped regions. In someembodiments, the etch stop layer may also serve as a stress layer forapplying a stress on the channel of the transistor to improveperformance.

Metal silicide contacts 172 and 173 may be formed on the S/D regions andon the gate electrodes. The metal silicide contacts, for example, may benickel-based contacts. Other types of metal silicide contacts may alsobe useful. For example, the metal silicide contact may be cobaltsilicide (CoSi). The silicide contacts may be about 50-300 Å thick.Other thicknesses may also be useful. The metal silicide contacts may beemployed to reduce contact resistance and facilitate contact to theback-end-of-line metal interconnects. For example, a dielectric layer(not shown) may be provided over the transistors. Via contacts, such astungsten contacts, may be formed in the dielectric layer coupling thecontact regions of the transistors to metal lines disposed in metallayers of the device.

The gain of the device is defined by the following equation:Gain=G _(m) ×R _(out)where G_(m)=transconductance; and

R_(out)=output resistance.

We have found that, when there is a heavy halo doping in the channel, italters the band bending and influences the threshold voltage of thetransistor. As a result, channel length modulation, drain inducedbarrier lowering (DIBL) and static feedback are affected, lowering thegain of the device. As described, the second or HG transistor, unlikethe first transistor, is not provided with LDD or halo regions. Thus, wehave discovered that without LDD and/or halo regions, the gain of thesecond transistor and the device is improved.

FIGS. 2 a-f show cross-sectional views of an embodiment of a process 200for forming a device. Referring to FIG. 2 a, a substrate 101 isprovided. The substrate, in one embodiment, is a silicon substrate. Thesubstrate may be a doped substrate, such as a p⁻ substrate. Other typesof substrates, such as a germanium-based, gallium arsenide, COI such asSOI, or sapphire, may also be useful. The substrate may be doped withother types of dopants or dopant concentrations.

The substrate includes first and second device regions 105 a-b. In oneembodiment, the first device region is for a core or logic transistorand the second device region is for a high gain (HG) transistor. Thesubstrate may also include regions for other types of circuitry,depending on the type of device or IC. For example, the device may alsoinclude regions for intermediate voltage (IV) and high voltage (HV)devices as well as an array region for memory devices.

The substrate is prepared with isolation regions 180 for isolating thedevice regions from other regions. For example, an isolation regionsurrounds a device region, isolating it from other device regions. Theisolation regions, for example, are STI regions. Other types ofisolation regions may also be useful. Various processes can be employedto form the STI regions. For example, the substrate can be etched usingetch and mask techniques to form trenches which are then filled withdielectric materials such as silicon oxide. Chemical mechanicalpolishing (CMP) can be performed to remove excess oxide and provide aplanar substrate top surface. Other processes or materials can also beused to form the STIs. The depth of the STI regions may be, for example,about 2000-5000 Å. Other depths for the STI regions may also be useful.

The substrate is prepared with device wells 112 in the first and seconddevice regions. The device wells may be formed by ion implantations. Toform the device wells, an implant mask (not shown) which exposes thedevice regions is used. The implant mask, for example, is a photoresistlayer patterned by a lithographic mask. The implant, for example,includes implanting second polarity type dopants into the substrate.

In one embodiment, the device wells are doped with second polarity typedopants. For example, the device wells are doped with p-type dopants.Alternatively, the second polarity type dopants may be n-type. Thedevice wells serve as bodies of the transistors. For example, the devicewell in the first device region serves as a body of the first transistorand the device well in the second device region serves as a body of thesecond transistor. A depth of the device wells may be about 0.5-5 μm.Other depths for the device wells may also be useful. The dopantconcentration of the device wells may be light to intermediate. Forexample, the dopant concentration of the device wells may be about5E12-5E13/cm². Other dopant concentration for the device wells may alsobe useful.

Referring to FIG. 2 b, gate layers of the gates are formed on thesubstrate. In one embodiment, the gate layers include a gate dielectriclayer 234 on the substrate and a gate electrode layer 236 formedthereon.

In one embodiment, the gate dielectric layer is silicon oxide. Othertypes of gate dielectric, for example, high k gate dielectric, may alsobe useful. The thickness of the gate dielectric layer may be about 10-40Å. Other thicknesses may also be useful. The gate dielectric layer maybe formed by thermal oxidation. For example, the dielectric layer isformed by wet oxidation followed by annealing the substrate in anoxidizing ambient. The temperature of the wet oxidation can be, forexample, about 600-900° C. The annealing can be, for example, performedat a temperature of about 600-1000° C. Forming other types of gatedielectric layers or using other processes may also be useful.

As shown, the thickness of the gate dielectrics for the transistors isthe same. For example, the first transistor is a core transistor. Inother embodiments, the transistors may have gate dielectrics ofdifferent thicknesses. For example, in the case where the firsttransistor is an IV or a HV transistor, the transistors may havedifferent gate dielectric thicknesses. In such cases, the substrate maybe prepared to have different gate dielectric thicknesses in the firstand second device regions.

As for the gate electrode layer, it may be a silicon layer. The siliconlayer, for example, may be a polysilicon layer. The thickness of thegate electrode layer may be about 700-5000 Å. Other thickness may alsobe useful. The gate electrode layer may be formed by, for example,chemical vapor deposition. Other techniques for forming the gateelectrode layer may also be useful. The gate electrode layer can beformed as an amorphous or non-amorphous layer. In the case of anamorphous layer, an anneal may be performed to form a polycrystallinesilicon layer.

Other types of gate dielectric and gate electrode materials orthicknesses may also be useful. For example, the gate dielectricmaterial may be a high k dielectric material while the gate electrodemay be a metal gate electrode material. Other configuration of gatelayers may also be useful. For example, the gate dielectric and/or gateelectrode layers may have multiple layers. The layers can be formed byvarious techniques, such as thermal oxidation, CVD and sputtering.

In FIG. 2 c, the gate layers are patterned to form first and secondgates 125 and 155 of first and second transistors. An etch mask may beemployed to pattern the gate layers to form the gates. For example, asoft mask, such as a photoresist layer, may be used. An exposure sourcemay selectively expose the photoresist layer through a reticlecontaining the desired pattern. After selectively exposing thephotoresist layer, it is developed to form openings corresponding tolocations when the gate layers are to be removed. To improvelithographic resolution, an anti-reflective coating (ARC) may be usedbelow the photoresist layer.

In other embodiments, the mask layer may be a hard mask layer. The hardmask layer, for example, may include TEOS or silicon nitride. Othertypes of hard mask materials may also be used. The hard mask layer maybe patterned using a soft mask, such as a photoresist.

An anisotropic etch, such as reactive ion etch (RIE) is performed usingthe etch mask to pattern the gate layers to form the gates. Other typesof etch processes may also be useful. In one embodiment, an RIE isemployed to pattern the gate layers to form the gates 125 and 155. Thegates, for example, may be gate conductors which serve as common gatesfor multiple transistors. Other configurations of the gate may also beuseful.

Referring to FIG. 2 d, a mask 284 is formed on the substrate. The mask,for example, is a photoresist mask. Other types of masks may also beuseful. The mask is patterned to form an opening in the first deviceregion while protecting the second device region. The mask protects thesecond device region from subsequent processing.

An ion implantation is performed. The mask serves as an implant mask,preventing the second device region from the implant. In one embodiment,an implant is performed to form LDD regions 124 in the first deviceregion. The implant, for example, is an angled implant. First polaritytype dopants are implanted into the substrate to form the LDD regions124.

The implant, for example, may be for the LDD regions in the substratebetween the gate and isolation region in the first device region. Forexample, the implant may dope the substrate exposed by the implant maskbetween the first gate and the isolation region. The depth of the LDDregions, for example, may be about 0.05-0.3 μm. The implant dose may beabout 5E13-5E15/cm² and the implant energy may be about 0.1-200 KeV.Other implant parameters may also be useful. As shown in FIG. 2 d, inneredges 124 a of the LDD regions adjacent to the sides of the gate arealigned with about sidewalls of the first gate 125. In one embodiment,the implant forms LDD regions which extend under the gate sidewalls. Forexample, the implant forms LDD regions which extend under the gate byabout 0.004-0.04 μm. Providing LDD regions which extend under the gateby other distances may also be useful.

An implant is performed to form halo regions. The implant, for example,is an angled implant. For example, the implant is performed at about20-45 degree with reference to the surface of the substrate. The haloregion, for example, extends under the gate beyond the LDD regions. Thehalo regions, for example, extend under the gate beyond the LDD regionsand above the first doped regions. The underlap portion may be, forexample, about 0.002-0.02 μm. Providing an underlap portion whichunderlaps the gate by other amounts may also be useful. The depth of thehalo regions, for example, may be about 0.07-0.4 μm. In one embodiment,the halo regions may be intermediate or heavily doped with secondpolarity dopants. The halo regions, for example, may have a dopantconcentration of about 5E13-5E14/cm². Other dopant concentrations forthe halo regions may also be useful. The halo regions, for example, havesecond polarity type dopants. The implant to form the halo regions mayemploy the same implant mask as the LDD regions. The implant to form thehalo regions may be performed before or after the implant to form theLDD regions. After the LDD and halo regions are formed, the implant maskis removed. The implant mask may be removed by, for example, ashing.Other techniques for removing the implant mask may also be useful. Ananneal, such as rapid thermal anneal (RTA), is performed after theimplant to activate the dopants in the LDD and halo regions.

As shown in FIG. 2 e, sidewall spacers 138 are formed on the sidewallsof the gates. To form the sidewall spacers, a dielectric layer isdeposited on the substrate. The dielectric layer, for example, may besilicon oxide. Other types of dielectric material, such as siliconnitride, may also be used. The dielectric layer may be formed by CVD.The dielectric layer may also be formed using other techniques. Thethickness of the dielectric layer may be, for example, 100-1000 Å. Otherthickness for the dielectric layer may also be useful. The thickness,for example, may depend on the desired width of the spacers. Ananisotropic etch, such as RIE, may be performed to remove horizontalportions of the dielectric layer, leaving spacers on the sidewalls ofthe gate. In some applications, the spacers may be formed from multipledielectric layers.

First and second doped regions 120 and 150 are formed in the substrateadjacent to the first and second gates. The doped regions are heavilydoped regions having first polarity type dopants. An implant, forexample, is performed using an implant mask, such as a photoresist mask,to form the first polarity type first and second doped regions in thefirst and second device regions. For example, the implant may dope thesubstrate exposed by the implant mask between the gate with the spacersand the isolation regions. The implant forms first and second heavilydoped regions which have inner edges 121 and 151 that are aligned withabout outer edges of the dielectric sidewall spacers of the first andsecond gate. The depth of the heavily doped regions, for example, isabout 0.1-0.4 μm. The implant dose may be about 1E15-1E16/cm² and theimplant energy may be about 10-100 KeV. Other implant parameters mayalso be useful. The doped regions serve as source/drain (S/D) regions ofthe transistors. An anneal, such as RTA, is performed after the implantto activate the dopants in the S/D regions. The inner edges of the dopedregions, for example, may extend under the dielectric spacers due todiffusion of the dopants from the doped regions. The first and seconddoped regions, as described, are formed by the same implant. Forming thefirst and second doped regions by separate implant processes may also beuseful.

After forming the S/D regions, the implant mask is removed. The implantmask may be removed by, for example, ashing. Other techniques forremoving the implant mask may also be useful.

Referring to FIG. 2 f, metal silicide contacts are formed on contactregions of the transistor. For example, the metal silicide contacts 172and 173 are formed on the gates and S/D regions of the transistors. Themetal silicide contacts, for example, are nickel based metal silicidecontacts. Other types of metal silicide contacts may also be useful. Themetal silicide contacts are used to facilitate low resistance contactsbetween the active substrate and the BEOL metal lines. In oneembodiment, the thickness of the salicide contacts is about 50-300 Å.Providing other thicknesses may also be useful.

To form the silicide contacts, a metal layer is deposited on the surfaceof the substrate. The metal layer, for example, may be nickel or analloy thereof. Other types of metallic layers, such as cobalt, or alloysthereof, including nickel, may also be used. The metal layer can beformed by Physical Vapor Deposition (PVD). Other types of metal layersand/or be formed by other types of processes can also be useful.

A anneal may be performed to cause a reaction between the metal and thesubstrate, forming a silicide layer. Excess metal not reacted in thesilicidation of the active surface is removed by, for example, a wetremoval process. For example, unreacted metal material is removedselective to the silicide contacts. Other techniques for forming thesilicide contacts may also be useful.

The process continues to form the device. The processing may includeforming a PMD layer and contacts to the terminals of the cell as well asone or more interconnect levels, final passivation, dicing, assembly andpackaging. Other processes may also be included. For example, othercomponents, such as low voltage, medium voltage, and high voltage I/Odevices can be formed prior to forming the interconnections.

The device formed by the process as described in FIGS. 2 a-f, mayinclude some or all advantages as described with respect to FIG. 1. Assuch, these advantages will not be described or described in detail.Moreover, the process as described does not require additional or extramask compared with baseline processes. In addition, the device can beformed together with other baseline core devices.

FIGS. 3 a-b show ID-VD graphs of different NMOS and PMOS devices of, forexample, the 0.13 μm technology node. The graphs plot drain current (ID)in amperes (A) versus drain voltage Vd in volts (V) of the devices.Lines 1 and 2 are devices having channel lengths of 0.5 μm and 10 μm,respectively, with LDD and halo regions; lines 3 and 4 are deviceshaving channel lengths of 0.5 μm and 10 μm, respectively without LDD andhalo regions. From the graphs, lines 1 and 2 show lower outputresistance than lines 3 and 4. For example, transistors without LDD andhalo regions exhibit much higher output resistance, and thus much highergain than those with LDD and halo regions. The gains of the transistorsare reflected in Tables 1a-b below:

TABLE 1a NMOS ID = 10 μA Gain LDD Gain No LDD LP = 1.5 V and Halo and noHalo Channel Length = 0.5 μm 45 236 Channel Length = 10 μm 57 1592

TABLE 1b PMOS ID = 10 μA Gain LDD Gain No LDD LP = 1.5 V and Halo and noHalo Channel Length = 0.5 μm 50 213 Channel Length = 10 μm 81 816

The invention may be embodied in other specific forms without departingfrom the spirit or essential characteristics thereof. The foregoingembodiments, therefore, are to be considered in all respectsillustrative rather than limiting the invention described herein. Scopeof the invention is thus indicated by the appended claims, rather thanby the foregoing description, and all changes that come within themeaning and range of equivalency of the claims are intended to beembraced therein.

What is claimed is:
 1. A method of forming a device comprising:providing a substrate having a core device region and a high gain (HG)device region for a HG transistor; forming a core gate on the substratein the core device region and a HG gate on the substrate in the HGdevice region, wherein the HG gate includes sidewall spacers on itssidewalls, wherein the core gate and HG gate include gate dielectric andgate electrode layers, and the gate dielectric layers of the core gateand HG gate comprise the same thickness; performing a lightly dopeddrain (LDD) implant, the LDD implant implants first polarity typedopants to form first polarity type LDD regions adjacent to the coregate, the first polarity type comprises n-type; and performing asource/drain (S/D) implant, the S/D implant implants first polarity typedopants to form heavily doped first polarity type core S/D regionsadjacent to the core gate and heavily doped first polarity type HG S/Dregions adjacent to the HG gate, the core device region includes coreS/D regions with LDD regions while the HG device region includes HG S/Dregions without LDD regions.
 2. The method of claim 1 wherein the HGtransistor comprises a channel which is disposed under the HG gate andthe channel length of the HG gate is at least about 0.5 μm.
 3. Themethod of claim 1 comprising forming sidewall spacers on gate sidewallsof the core gate in the core device region.
 4. The method of claim 1comprising: providing a mask having an opening exposing the core deviceregion while covering the HG device region on the substrate; andperforming an implant to form second polarity type halo regions in thecore device region.
 5. The method of claim 1 comprising forming haloregions in the core device region.
 6. A method of forming a devicecomprising: providing a substrate having at least a first device regionfor a first transistor and a second device region for a secondtransistor, wherein the first and second device regions comprise firstpolarity type devices, the first polarity type comprises n-type, whereinthe first transistor comprises a core transistor and the secondtransistor comprises a high gain (HG) transistor; forming a first gateon the first device region and a second gate on the second deviceregion, the gates include sidewall spacers on their sidewalls, whereinforming the first gate and the second gate comprises forming a gatedielectric layer on a top surface of the substrate and a gate electrodelayer over the gate dielectric layer, and patterning the gate dielectricand gate electrode layers to form the first and second gates, whereinthe gate dielectrics of the first and second gate comprise the samethickness; forming first polarity type lightly doped drain (LDD)regions; and performing a source/drain (S/D) implant to form firstpolarity type heavily doped S/D regions adjacent to the first and secondgates, wherein the first device region includes first S/D regions withLDD regions while the second device region includes second S/D regionswithout LDD regions.
 7. The method of claim 6 wherein the HG transistorcomprises a channel which is disposed under the second gate and thechannel length of the second gate is at least about 0.5 μm.
 8. Themethod of claim 6 comprising: providing a mask having an openingexposing the first device region while covering the second device regionon the substrate; and performing an implant to form the first polaritytype LDD regions in the first device region.
 9. The method of claim 8wherein inner edges of the first polarity type LDD regions adjacent tosides of the first gate are aligned with about sidewalls of the firstgate.
 10. The method of claim 8 wherein the implant to form the firstpolarity type LDD regions comprises an angled implant and inner edges ofthe LDD regions extend under sidewalls of the first gate.
 11. The methodof claim 8 comprising: performing an implant to form second polaritytype halo regions in the first device region.
 12. The method of claim 11wherein the implant to form the second polarity type halo regions isperformed before the implant to form the first polarity type LDDregions.
 13. A method of forming a device comprising: providing asubstrate having a core device region for a core transistor and a highgain (HG) device region for a HG transistor, wherein the core and HGdevice regions comprise first polarity type devices which is n-type;forming a core gate on the substrate in the core device region and a HGgate on the substrate in the HG device region, wherein the core gate andthe HG gate include sidewall spacers on their sidewalls, wherein thecore gate and HG gate include gate dielectric and gate electrode layers,and the gate dielectric layers of the core gate and HG gate comprise thesame thickness; forming first polarity type lightly doped drain (LDD)regions only in the core device region, wherein inner edges of the LDDregions are aligned with about sidewalls of the core gate; andperforming a source/drain (S/D) implant to form first polarity typeheavily doped S/D regions adjacent to the core and HG gates, the coredevice region includes core S/D regions with LDD regions while the HGdevice region includes HG S/D regions without LDD regions.
 14. A methodof forming a device comprising: providing a substrate having a coredevice region for a core transistor and a high gain (HG) device regionfor a HG transistor; forming a gate on the substrate in the core deviceregion and a HG gate on the substrate in the HG device region, whereinthe gate and the HG gate include sidewall spacers on their sidewalls,and the core transistor comprises a channel length which is less thanabout 0.18 μm and the HG transistor comprises a channel length which isat least about 0.5 μm; and forming lightly doped drain (LDD) regionsonly in the core device region, wherein inner edges of the LDD regionsare aligned with about sidewalls of the gate.
 15. The method of claim 13wherein forming the first polarity type LDD regions comprises: providinga mask having an opening exposing the core device region while coveringthe HG device region on the substrate; and performing an implant to formthe first polarity type LDD regions only in the core device region. 16.The method of claim 15 wherein inner edges of the heavily doped regionsare aligned with about outer edges of the sidewall spacers of the gates.